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Pattern transfer by dry etching and plasma-enhanced chemical vapor de position are two of the cornerstone techniques for modern integrated cir cuit fabrication.

MEMs Materials and Processes Handbook" is a comprehensive reference for researchers searching for new materials, properties of known materials, or specific proc

With the encroachment of the Internet into nearly all aspects of work and life, it seems as though information is everywhere. However, there is information and

Finding new materials for copper/low-k interconnects is critical to the continuing development of computer chips. While copper/low-k interconnects have served w

Based on a project backed by the European Union, this is a must-have resource for researchers in industry and academia concerned with application-oriented plasm