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Ion implantation offers one of the best examples of a topic that starting from the basic research level has reached the high technology level within the framewo

Ion implantation is one of the key processing steps in silicon integrated circuit technology. Some integrated circuits require up to 17 implantation steps and c

This unique new book is a comprehensive review of the many current industrial applications of particle accelerators, written by experts in each of these fields.

Learn the latest advances in SiC (Silicon Carbide) technology from the leading experts in the field with this new cutting-edge resource. The book is your single