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Microelectromechanical systems (MEMS) are miniaturized devices with high functionality. In recent years, MEMS products have become increasingly dominant in ever

Microelectromechanical systems (MEMS) are miniaturized devices with high functionality. In recent years, MEMS products have become increasingly dominant in ever

This significant and uniquely comprehensive five-volume reference is a valuable source for research workers, practitioners, computer scientists, students, and t