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Organic Inorganic Photoresist and Laser Induced Heating Process for Next Generation Lithography
Language: en
Pages: 344
Authors: Jing Jiang
Categories:
Type: BOOK - Published: 2015 - Publisher:

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What technology will enable lithography to continue Moore's law beyond 10 nm node? Traditional photolithography, using a 193 nm wavelength and chemically amplif
Materials and Processes for Next Generation Lithography
Language: en
Pages: 636
Authors:
Categories: Science
Type: BOOK - Published: 2016-11-08 - Publisher: Elsevier

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As the requirements of the semiconductor industry have become more demanding in terms of resolution and speed it has been necessary to push photoresist material
Small Molecule Photoresist Materials for Next Generation Lithography
Language: en
Pages: 414
Authors: Marie Elyse Krysak
Categories:
Type: BOOK - Published: 2013 - Publisher:

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Photolithography remains the most efficient method to create semiconductor devices. Moore's law states that the number of transistors per integrated circuit wil
Solvent-based Development of Photoresists for Next-generation Lithography
Language: en
Pages: 334
Authors: Christine Y. Ouyang
Categories:
Type: BOOK - Published: 2013 - Publisher:

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As feature sizes continue to shrink, the need for new materials and new processes for next-generation lithography becomes more urgent. Although aqueous base dev
Laser-induced Graphene
Language: en
Pages: 88
Authors: Ruquan Ye
Categories: Graphene
Type: BOOK - Published: 2020-11-30 - Publisher:

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LIG is a revolutionary technique that uses a common CO2 infrared laser scriber, like the one used in any machine shop, for the direct conversion of polymers int
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