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Type: BOOK - Published: 2015 - Publisher:
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Type: BOOK - Published: 2016-11-08 - Publisher: Elsevier
As the requirements of the semiconductor industry have become more demanding in terms of resolution and speed it has been necessary to push photoresist material
Language: en
Pages: 414
Pages: 414
Type: BOOK - Published: 2013 - Publisher:
Photolithography remains the most efficient method to create semiconductor devices. Moore's law states that the number of transistors per integrated circuit wil
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Pages: 334
Pages: 334
Type: BOOK - Published: 2013 - Publisher:
As feature sizes continue to shrink, the need for new materials and new processes for next-generation lithography becomes more urgent. Although aqueous base dev
Language: en
Pages: 88
Pages: 88
Type: BOOK - Published: 2020-11-30 - Publisher:
LIG is a revolutionary technique that uses a common CO2 infrared laser scriber, like the one used in any machine shop, for the direct conversion of polymers int