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This book covers theoretical and practical aspects of all major steps in the fabrication sequence. This book can be used conveniently in a semester length cours

GaAs processing has reached a mature stage. New semiconductor compounds are emerging that will dominate future materials and device research, although the proce

Microelectromenchanical systems (MEMS) is a revolutionary field that adapts for new uses a technology already optimized to accomplish a specific set of objectiv

Master fundamental technologies for modern semiconductor integrated circuits with this definitive textbook. It includes an early introduction of a state-of-the-