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This completely revised edition of a bestselling concise introduction to microsystems technology includes the latest trends in this emerging scientific discipli

Biomolecular studies are the trial of Man to understand how Nature manages information at the molecular level. The understanding of molecular informa tion handl

Microsystem technology (MST) integrates very small (up to a few nanometers) mechanical, electronic, optical, and other components on a substrate to construct fu

Over half a century after the discovery of the piezoresistive effect, microsystem technology has experienced considerable developments. Expanding the opportunit

This is the first compendium on silicon/glass microsystems made by deep wet etching and the first book with a detailed description of bonding techniques used in