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Plasma Etching Processes for Sub-quarter Micron Devices
Language: en
Pages: 396

Plasma Etching Processes for Sub-quarter Micron Devices

Authors: G. S. Mathad
Categories: Integrated circuits
Type: BOOK - Published: 2000 - Publisher: The Electrochemical Society

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Proceedings of the Eleventh International Symposium on Plasma Processing
Language: en
Pages: 740

Proceedings of the Eleventh International Symposium on Plasma Processing

Authors: Electrochemical Society. Dielectric Science and Technology Division
Categories: Science
Type: BOOK - Published: 1996 - Publisher: The Electrochemical Society

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Proceedings of the Fourth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing
Language: en
Pages: 642

Proceedings of the Fourth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing

Authors: Richard E. Novak
Categories: Technology & Engineering
Type: BOOK - Published: 1996 - Publisher: The Electrochemical Society

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Proceedings of the Symposium on Wide Bandgap Semiconductors and Devices and the Twenty-Third State-of-the-Art Program on Compound Semiconductors (SOTAPOCS XXIII)
Language: en
Pages: 524

Proceedings of the Symposium on Wide Bandgap Semiconductors and Devices and the Twenty-Third State-of-the-Art Program on Compound Semiconductors (SOTAPOCS XXIII)

Authors: F. Ren
Categories: Technology & Engineering
Type: BOOK - Published: 1995 - Publisher: The Electrochemical Society

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Silicon Materials Science and Technology
Language: en
Pages: 800

Silicon Materials Science and Technology

Authors:
Categories: Semiconductors
Type: BOOK - Published: 1998 - Publisher:

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