Rapid Thermal Processing and beyond: Applications in Semiconductor Processing

Download or Read eBook Rapid Thermal Processing and beyond: Applications in Semiconductor Processing PDF written by Wielfried Lerch and published by Trans Tech Publications Ltd. This book was released on 2008-03-24 with total page 427 pages. Available in PDF, EPUB and Kindle.

Author	: Wielfried Lerch
Publisher	: Trans Tech Publications Ltd
Total Pages	: 427
Release	: 2008-03-24
ISBN-10	: 9783038131731
ISBN-13	: 3038131733
Rating	: 4/5 (31 Downloads)

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Book Synopsis Rapid Thermal Processing and beyond: Applications in Semiconductor Processing by : Wielfried Lerch

Book excerpt: Special topic volume with invited papers only

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