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A User's Guide to Vacuum Technology

Download or Read eBook A User's Guide to Vacuum Technology PDF written by John F. O'Hanlon and published by John Wiley & Sons. This book was released on 2005-02-18 with total page 536 pages. Available in PDF, EPUB and Kindle.
A User's Guide to Vacuum Technology
Author :
Publisher : John Wiley & Sons
Total Pages : 536
Release :
ISBN-10 : 9780471467151
ISBN-13 : 0471467154
Rating : 4/5 (51 Downloads)

Book Synopsis A User's Guide to Vacuum Technology by : John F. O'Hanlon

Book excerpt: In the decade and a half since the publication of the Second Edition of A User?s Guide to Vacuum Technology there have been many important advances in the field, including spinning rotor gauges, dry mechanical pumps, magnetically levitated turbo pumps, and ultraclean system designs. These, along with improved cleaning and assembly techniques have made contamination-free manufacturing a reality. Designed to bridge the gap in both knowledge and training between designers and end users of vacuum equipment, the Third Edition offers a practical perspective on today?s vacuum technology. With a focus on the operation, understanding, and selection of equipment for industrial processes used in semiconductor, optics, packaging, and related coating technologies, A User?s Guide to Vacuum Technology, Third Edition provides a detailed treatment of this important field. While emphasizing the fundamentals and touching on significant topics not adequately covered elsewhere, the text avoids topics not relevant to the typical user.


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