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Language: en
Pages: 320
Pages: 320
Type: BOOK - Published: 2003-05-02 - Publisher: Trans Tech Publications Ltd
The issues addressed by the Sixth International Symposium on the Ultra Clean Processing of Silicon Surfaces included all aspects of ultra-clean Si-technology, c
Language: en
Pages: 398
Pages: 398
Type: BOOK - Published: 2005-04-01 - Publisher: Trans Tech Publications Ltd
Volume is indexed by Thomson Reuters CPCI-S (WoS). This book is sub-divided into 10 different topical sections; each dealing with important issues in surface cl
Language: en
Pages: 340
Pages: 340
Type: BOOK - Published: 2001-01-02 - Publisher: Trans Tech Publications Ltd
Volume is indexed by Thomson Reuters CPCI-S (WoS). The proceedings of the Fifth International Symposium on Ultra Clean Processing of Silicon Surfaces cover all
Language: en
Pages: 634
Pages: 634
Type: BOOK - Published: 2013-03-09 - Publisher: Springer Science & Business Media
A totally new concept for clean surface processing of Si wafers is introduced in this book. Some fifty distinguished researchers and engineers from the leading
Language: en
Pages: 426
Pages: 426
Type: BOOK - Published: 2004 - Publisher:
