Atomic Layer Deposition for Semiconductors
Download or Read eBook Atomic Layer Deposition for Semiconductors PDF written by Cheol Seong Hwang and published by Springer Science & Business Media. This book was released on 2013-10-18 with total page 266 pages. Available in PDF, EPUB and Kindle.
| Author | : Cheol Seong Hwang |
| Publisher | : Springer Science & Business Media |
| Total Pages | : 266 |
| Release | : 2013-10-18 |
| ISBN-10 | : 9781461480549 |
| ISBN-13 | : 146148054X |
| Rating | : 4/5 (49 Downloads) |
Book Synopsis Atomic Layer Deposition for Semiconductors by : Cheol Seong Hwang
Book excerpt: Offering thorough coverage of atomic layer deposition (ALD), this book moves from basic chemistry of ALD and modeling of processes to examine ALD in memory, logic devices and machines. Reviews history, operating principles and ALD processes for each device.
