Book excerpt: This book presents a collection of chapters written by experienced researchers in the fields of laser micro- and nano-scale processing for both surface and bulk processing covering surface modification processes, laser material interaction regimes, laser system construction for micro- and nanomachining applications, and the thermal mathematical modelling of laser processes. As an important reference for researchers in the field of micro- and nano-scale processing, this book aims to assist researchers and postgraduates in becoming familiar with the principles, capabilities and potential of the laser processing of materials quickly. Offering a one-stop reference, this book provides an understanding of the physical phenomena, process principles, latest achievements, and applications from the key researchers and research groups that focus on precision micro- and nano-scale laser processing. Part of IOP Series in Coherent Sources, Quantum Fundamentals, and Applications.