Materials Science in Microelectronics II
Author | : Eugene Machlin |
Publisher | : Elsevier |
Total Pages | : 268 |
Release | : 2010-07-07 |
ISBN-10 | : 9780080460406 |
ISBN-13 | : 0080460402 |
Rating | : 4/5 (06 Downloads) |
Book excerpt: The subject matter of thin-films – which play a key role in microelectronics – divides naturally into two headings: the processing / structure relationship, and the structure / properties relationship. Part II of 'Materials Science in Microelectronics' focuses on the latter of these relationships, examining the effect of structure on the following: •Electrical properties•Magnetic properties•Optical properties•Mechanical properties•Mass transport properties•Interface and junction properties•Defects and properties - Captures the importance of thin films to microelectronic development - Examines the cause / effect relationship of structure on thin film properties