Microlithography Fundamentals in Semiconductor Devices and Fabrication Technology
Download or Read eBook Microlithography Fundamentals in Semiconductor Devices and Fabrication Technology PDF written by Saburo Nonogaki and published by CRC Press. This book was released on 2018-10-08 with total page 336 pages. Available in PDF, EPUB and Kindle.
| Author | : Saburo Nonogaki |
| Publisher | : CRC Press |
| Total Pages | : 336 |
| Release | : 2018-10-08 |
| ISBN-10 | : 9781482273762 |
| ISBN-13 | : 1482273764 |
| Rating | : 4/5 (62 Downloads) |
Book Synopsis Microlithography Fundamentals in Semiconductor Devices and Fabrication Technology by : Saburo Nonogaki
Book excerpt: "Explores the science and technology of lithographic processes and resist materials and summarizes the most recent innovations in semiconductor manufacturing. Considers future trends in lithography and resist material technology. Reviews the interaction of light, electron beams, and X-rays with resist materials."
