Book excerpt: Piezoelectric systems are widely employed in precision engineering and the capability for precision tracking at broadband frequencies is increasingly appealing. However, the performance of dynamic tracking is limited over a wide range of frequencies, because of the coupled hysteresis, creep, and vibration dynamics. This book thus presents the modeling and control of piezoelectric systems over a broad range of frequencies. The mathematical and physical modeling are proposed as well as the model-based feedforward and several feedback approaches. This book is suitable for graduates and researchers in precision engineering, especially interested in high-speed and precision motion of instruments.