Nanofabrication Using Focused Ion and Electron Beams
Download or Read eBook Nanofabrication Using Focused Ion and Electron Beams PDF written by Ivo Utke and published by OUP USA. This book was released on 2012-05 with total page 830 pages. Available in PDF, EPUB and Kindle.
Author | : Ivo Utke |
Publisher | : OUP USA |
Total Pages | : 830 |
Release | : 2012-05 |
ISBN-10 | : 9780199734214 |
ISBN-13 | : 0199734216 |
Rating | : 4/5 (14 Downloads) |
Book Synopsis Nanofabrication Using Focused Ion and Electron Beams by : Ivo Utke
Book excerpt: This book comprehensively reviews the achievements and potentials of a minimally invasive, three-dimensional, and maskless surface structuring technique operating at nanometer scale by using the interaction of focused ion and electron beams (FIB/FEB) with surfaces and injected molecules.