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Nanolithography

Download or Read eBook Nanolithography PDF written by M. Gentili and published by Springer Science & Business Media. This book was released on 2013-03-09 with total page 214 pages. Available in PDF, EPUB and Kindle.
Nanolithography
Author :
Publisher : Springer Science & Business Media
Total Pages : 214
Release :
ISBN-10 : 9789401582612
ISBN-13 : 9401582610
Rating : 4/5 (12 Downloads)

Book Synopsis Nanolithography by : M. Gentili

Book excerpt: Success in the fabrication of structures at the nanometer length scale has opened up a new horizon to condensed matter physics: the study of quantum phenomena in confined boxes, wires, rings, etc. A new class of electronic devices based on this physics has been proposed, with the promise of a new functionality for ultrafast and/or ultradense electronic circuits. Such applications demand highly sophisticated fabrication techniques, the crucial one being lithography. Nanolithography contains updated reviews by major experts on the well established techniques -- electron beam lithography (EBL), X-ray lithography (XRL), ion beam lithography (IBL) -- as well as on emergent techniques, such as scanning tunnelling lithography (STL).


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