The Physics of Micro/Nano-Fabrication
Download or Read eBook The Physics of Micro/Nano-Fabrication PDF written by Ivor Brodie and published by Springer Science & Business Media. This book was released on 2013-06-29 with total page 661 pages. Available in PDF, EPUB and Kindle.
Author | : Ivor Brodie |
Publisher | : Springer Science & Business Media |
Total Pages | : 661 |
Release | : 2013-06-29 |
ISBN-10 | : 9781475767759 |
ISBN-13 | : 1475767757 |
Rating | : 4/5 (59 Downloads) |
Book Synopsis The Physics of Micro/Nano-Fabrication by : Ivor Brodie
Book excerpt: In this revised and expanded edition, the authors provide a comprehensive overview of the tools, technologies, and physical models needed to understand, build, and analyze microdevices. Students, specialists within the field, and researchers in related fields will appreciate their unified presentation and extensive references.