Ultra Clean Processing of Semiconductor Surfaces VIII
Download or Read eBook Ultra Clean Processing of Semiconductor Surfaces VIII PDF written by Paul Mertens and published by Trans Tech Publications Ltd. This book was released on 2007-11-20 with total page 400 pages. Available in PDF, EPUB and Kindle.
| Author | : Paul Mertens |
| Publisher | : Trans Tech Publications Ltd |
| Total Pages | : 400 |
| Release | : 2007-11-20 |
| ISBN-10 | : 9783038131953 |
| ISBN-13 | : 3038131954 |
| Rating | : 4/5 (53 Downloads) |
Book Synopsis Ultra Clean Processing of Semiconductor Surfaces VIII by : Paul Mertens
Book excerpt: Volume is indexed by Thomson Reuters CPCI-S (WoS). This collection of 86 peer-reviewed papers covers all aspects of the use of ultra-clean technology for large-scale integration on semiconductors, and cleaning and contamination-control in both front-end-of-line (FEOL) and back-end-of-line (BEOL) processing.
