Ultra Clean Processing of Silicon Surfaces IV
Download or Read eBook Ultra Clean Processing of Silicon Surfaces IV PDF written by Marc Heyns and published by Trans Tech Publications Ltd. This book was released on 1998-11-21 with total page 316 pages. Available in PDF, EPUB and Kindle.
Author | : Marc Heyns |
Publisher | : Trans Tech Publications Ltd |
Total Pages | : 316 |
Release | : 1998-11-21 |
ISBN-10 | : 9783035706833 |
ISBN-13 | : 3035706832 |
Rating | : 4/5 (33 Downloads) |
Book Synopsis Ultra Clean Processing of Silicon Surfaces IV by : Marc Heyns
Book excerpt: The proceedings of the Fourth International Symposium on Ultra Clean Processing of Silicon Surfaces (UCPSS '98) cover all aspects of ultra-clean Si-technology: cleaning, contamination control, Si-surface chemistry and topography, and its relationship to device performance and process yield. New areas of concern include: cleaning at the interconnect level, resist strip and polymer removal (dry and wet), cleaning and contamination aspects of metallization, wafer backside cleaning and cleaning after Chemical-Mechanical-Polishing (CMP).